Mixing chambers for creating homogeneous gas mixtures
There is an increasing need for special gas mixtures. Moreover, very often varying concentrations are required. Bronkhorst High-Tech have gained much experience in supplying Mass Flow Controllers for such applications. Creating homogeneous gas mixtures is not just a matter of putting the controlled flows of two or more gas streams together; for instance, if you need to dilute 1 mln/min of dopant with 10 ln/min of dilution gas you cannot expect to obtain a homogeneous mixture unless an appropriate mixing chamber is used. Bronkhorst High-Tech have developed a series of special mixing chambers for such purposes. Please contact your local distributor to discuss the options for your application.
Please find here our leaflet "Gas Mixing Chambers"